Equipments for Polysilicon facilities.
CVD Reactor (Chemical Vapor Deposition): to produce polysilicon
Multi- Crystalline Ingot Furnace: to produce solar silicon multi – Crystalline ingots
Vent Gas Recovery Unit: for treatment of reactor & converter vent gas streams.
STC- TCS Convertor: to transform Silicon tetra Chloride, SiCL4(STC) to Tri Chloro Silane, SiHCL3(TCS)
LAB CVD Reactor: for quality assurance & operator training